In the frame of Tech4Bio multidisciplinary group, a strong experience in micro and nanofabrication is available along with two fully equipped clean rooms in the Rome area.
Micro (nano) fabrication is a process used to construct physical objects with dimensions in the micro (nano) meter to millimeter range and takes advantage of established semiconductor fabrication processes, with the possibility to parallelize the production and downsize costs down to few cent per devices, plus specially developed techniques to reach wider applications.
Example of micro (nano) fabricated devices span from devices including moving parts, such as cantilevers, to static structures such as flow channels and wells, chemically sensitive surfaces like functionalized nanostructured surfaces, and electrical and photonic devices such as transistors or waveguides, also integrated with other device on the same chip.
In particular micro and nanofabrication can realize tools for molecular biology and biochemistry, for cell biology, medicine, and biosensors.
INSTRUMENTATION TOOLS
Two state of the art microfabrication facility fully equipped for thin film technologies and for soft lithography techniques:
250 mq of clean rooms (150 mq ISO 5 and 100mq ISO 6) + metri quadri della clean room IMM
Electron beam lithography system Vistec EBPG 5HR, working at 100 kV .with resolution of 20 nm.
EV-420 double-face contact mask-aligner for Optical Lithography
Karl Suss Mask Aligner for Optical Lithography ??
Reactive Ion Etching systems based of fluorine (CF 4, CHF 3 , SF 6 . , O 2 ,, Ar) to etch silicon and composite
Reactive Ion Etching system based of clorine (Cl 2 , BrCl, O 2 ., Ar) to etch III-V materials and metal.
Electroplating systems for Au and Ni
E-gun and thermal evaporation systems for metals and dielectric materials
ECR-PECVD system for the deposition of Si composites.
Rf Sputtering systems for deposition of metals and dieletric materials
Nanoimprint press
Rf- sputtering for the deposition of dielectric materials
Tubular ovens (max T = 1200°C)